This model is a highly sensitive C5F8 / C4F6 / or C3F6 gas monitor which uses a special techniquie for detecting C5F8, C4F6 or C3F6. into more readily detectable compounds.
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Then, the resulting compounds cause a chemical reaction on a colorimetric tape, and the intensity of the chemical reaction is analyzed and correlated to a specific ppm level of C5F8, C4F6 or C3F6 present in the sample. The detection tape is in a handy cassette which is easily removed for periodic replacement.
Product Highlights
Ideal for low gas concentration
Ideal for monitoring semiconductor fab clean rooms
Minimal interference from solvents such as Fluorinert and Galden